Probe station device
AssigneesMi Ryeong CHO, Korea Basic Science Institute
InventorsSeung Young PARK, Yeon Suk CHOI, Jisung LEE, Myang Su KIM
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Abstract
A probe station device according to one embodiment comprises: a sample stage on which a specimen is placed; a refrigerator which is disposed below the sample stage and which controls the temperature of the sample stage; a mounting part which is disposed below the refrigerator and which supports the refrigerator; a first chamber for encompassing the outside of the sample stage; a second chamber of which the inside is maintained in a vacuum state and which encompasses the outside of the first chamber; and a vibration-reducing member that connects the refrigerator to the second chamber, wherein the sample stage, the first chamber and the second chamber can be connected to each other.
Claims22
A probe station device comprising:
- a sample stage on which a specimen is placed;
- a refrigerator disposed below the sample stage and configured to control temperature of the sample stage;
- a mounting portion disposed below the refrigerator and configured to support the refrigerator;
- a first chamber configured to surround an outside of the sample stage;
- a second chamber configured to maintain a vacuum state inside and surround an outside of the first chamber;
- and
- a vibration reduction member configured to connect the refrigerator to the second chamber,
- wherein the sample stage, the first chamber, and the second chamber are connected to each other.
A probe station device comprising:
- a sample stage on which a specimen is placed;
- a refrigerator disposed below the sample stage and configured to control temperature of the sample stage;
- a mounting portion disposed below the refrigerator and supported by a ground;
- a stage supporter connected to the mounting portion and configured to support the sample stage;
- a first chamber surrounding an outside of the sample stage;
- a second chamber configured to maintain a vacuum state inside and surround an outside of the first chamber;
- and
- a vibration reduction member configured to connect the refrigerator to the second chamber,
- wherein the sample stage is capable of receiving a load of the mounting portion through the stage supporter.
Dependencies are inferred from the claim text.