Multi-prober cartridge

A multi-prober cartridge, comprising:

• a probe card comprising a plurality of probes, a main circuit board electrically connected to the plurality of probes, and a central frame supporting a central region of the main circuit board;
• a wafer chuck on which a wafer in contact with the plurality of probes is supported;
• and
• a coupling auxiliary structure coupled to the probe card and configured to be coupled to the wafer chuck to couple the probe card to the wafer chuck,
• wherein the coupling auxiliary structure comprises:
• a bridge plate comprising a bridge part fixed to the central frame and a plate part connected to the bridge part and extending in a lateral direction of the probe card;
• a base plate supporting one surface of the plate part;
• a coupling member having one side fixed to the base plate and the other side pressing the other surface of the plate part to couple the probe card to the base plate;
• and
• an electromagnet part supported by the base plate and magnetically engageable with a chuck electromagnet part supported by the wafer chuck.

A multi-prober cartridge, comprising:

• a probe card comprising a plurality of probes, a main circuit board electrically connected to the plurality of probes, and a central frame supporting a central region of the main circuit board;
• a wafer chuck on which a wafer in contact with the plurality of probes is supported;
• and
• a coupling auxiliary structure coupled to the probe card and configured to be coupled to the wafer chuck to couple the probe card to the wafer chuck,
• wherein the coupling auxiliary structure comprises:
• a bridge plate comprising a bridge part fixed to the central frame and a plate part connected to the bridge part and extending in a lateral direction of the probe card;
• and
• an electromagnet part supported by the bridge plate and magnetically engageable with a chuck electromagnet part supported by the wafer chuck.