Probe
AssigneeKabushiki Kaisha Nihon Micronics
InventorMika NASU
Life of this patent
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Abstract
A probe includes: a tip member that has a support portion; and a base material in which a joint region is formed by retracting a portion of a side surface in a thickness direction perpendicular to an axial direction within a certain range along the axial direction from one end. A first side surface of the support portion of the tip member and a retracted opposed side surface of the base material exposed in the joint region abut against each other, and the tip member and the base material are joined together. A convex portion that projects in the thickness direction is formed on one of the first side surface and the opposed side surface, and a concave portion that fits with the convex portion is formed on the other of the first side surface and the opposed side surface.
Claims9
A probe used for inspecting the electrical characteristics of an inspection object, the probe comprising:
- a tip member that has a support portion and is configured to be in contact with the inspection object;
- and
- a base material in which a joint region is formed by retracting a portion of a side surface in a thickness direction perpendicular to an axial direction within a certain range along the axial direction from one end;
- wherein
- a first side surface of the support portion of the tip member and a retracted side surface of the base material exposed in the joint region abut against each other, and the support portion is joined to the base material, and
- a convex portion that projects in the thickness direction is formed on one of the first side surface and the retracted side surface, and a concave portion that fits with the convex portion is formed on the other of the first side surface and the retracted side surface.
Dependencies are inferred from the claim text.