Substrate inspection apparatus
AssigneesSamsung Electronics Co., Ltd., The Texas A&M University System
InventorsEunhyuk CHOI, Chabum LEE, Myungjun LEE, Taejoong KIM, Inkeun BAEK
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Abstract
Provided is a substrate inspection apparatus configured to inspect a substrate, the substrate inspection apparatus including a first probe on an upper portion of the substrate, a second probe on a lower portion of the substrate opposite to the first probe, the second probe being configured to have a polarity opposite to that of the first probe, and an impedance analyzer configured to measure an impedance by at least one of a current applied to the first probe and the second probe and a voltage applied to the first probe and the second probe.
Claims20
A substrate inspection apparatus configured to inspect a substrate, the substrate inspection apparatus comprising:
- a first probe on an upper portion of the substrate;
- a second probe on a lower portion of the substrate opposite to the first probe, a polarity of the second probe being opposite to a polarity of the first probe;
- and
- an impedance analyzer configured to measure an impedance by at least one of a current applied to the first probe and the second probe and a voltage applied to the first probe and the second probe.
A substrate inspection apparatus configured to inspect a substrate, the substrate inspection apparatus comprising:
- a first probe on an upper portion of the substrate and configured to comprise a first magnetic body having magnetism;
- a second probe on a lower portion of the substrate opposite to the first probe, the second probe being configured to have a second magnetic body having magnetism opposite to the magnetism of the first magnetic body;
- and
- an impedance analyzer configured to measure an impedance by at least one of a current applied to the first probe and the second probe and a voltage applied to the first probe and the second probe,
- wherein the first probe and the second probe are self-aligned along a same vertical axis.
A substrate inspection apparatus for inspecting a substrate, the substrate inspection apparatus comprising:
- a substrate support configured to support the substrate;
- a first probe on an upper portion of the substrate;
- a second probe on a lower portion of the substrate opposite to the first probe, a polarity of the second probe being different from a polarity of the first probe;
- an impedance analyzer configured to apply an alternating current (AC) signal to the first probe and the second probe and detect a change in an impedance based on a frequency generated from the AC signal;
- and
- an information management and analyzer configured to compare and analyze information about a pre-secured substrate and information measured from the impedance analyzer to obtain information about a bonding layer between an upper substrate and a lower substrate included in the substrate.
Dependencies are inferred from the claim text.