X-ray inspection apparatus
AssigneeAnritsu Corporation
InventorsTakashi KANAI, Tatsuki KOMATSUBARA, Naoya SAITO
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AssigneeAnritsu Corporation
InventorsTakashi KANAI, Tatsuki KOMATSUBARA, Naoya SAITO
Estimating the term…
An X-ray inspection apparatus includes: an irradiation unit that irradiates an article with X-rays; a detection unit that detects the X-rays transmitted through the article; an image generation unit that generates an image corresponding to a detection result of the detection unit; and an inspection unit that inspects the article based on the image, in which the irradiation unit includes an X-ray generation source that outputs X-rays having a continuous spectrum, and a physical filter that removes a partial band of the X-rays output by the X-ray generation source to irradiate the article with resulting X-rays from which a partial band of the X-rays has been removed, and the detection unit detects, using a photon-counting method, the X-rays transmitted through the article, the X-rays being X-rays from which a band unnecessary for image generation in the image generation unit has been removed by the physical filter.
An X-ray inspection apparatus comprising:
Dependencies are inferred from the claim text.