Workpiece visual inspection apparatus and method
AssigneeTokyo Seimitsu Co., Ltd.
InventorYuki MAEDA
Life of this patent
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Abstract
A workpiece visual inspection apparatus 1 includes a chuck table 2 on which a workpiece W is placed, cameras 4A, 4B, and 4C that image a processed surface Wa of the workpiece W, a first slide mechanism 23 and a second slide mechanism 44 that move at least one of the chuck table 2 and the cameras 4A, 4B, and 4C relative to the other, to scan respective imaging positions 4a, 4b, and 4c of the cameras 4A, 4B, and 4C in a rectangular shape as viewed from the top, and a determination unit 52 that determines a quality of the workpiece W on the basis of a plurality of captured images obtained by imaging with the cameras 4A, 4B, and 4C.
Claims7
A workpiece visual inspection apparatus that determines a quality of a workpiece after back surface processing, the workpiece visual inspection apparatus comprising:
- a chuck table on which the workpiece is placed;
- an imaging unit that images a processed surface of the workpiece;
- a driving mechanism that moves at least one of the chuck table and the imaging unit relative to the other, to scan an imaging position of the imaging unit in a rectangular shape as viewed from the top;
- and
- a determination unit that determines the quality of the workpiece on the basis of a plurality of captured images obtained by the imaging with the imaging unit.
A workpiece visual inspection method for determining a quality of a workpiece after back surface processing, the workpiece visual inspection method comprising the steps of:
- placing the workpiece on a chuck table;
- moving at least one of the chuck table and an imaging unit relative to the other, to scan an imaging position of the imaging unit in a rectangular shape as viewed from the top so that the imaging unit images a processed surface of the workpiece;
- and
- determining the quality of the workpiece on the basis of a plurality of captured images obtained by the imaging with the imaging unit.
Dependencies are inferred from the claim text.