Surface inspection tool for transfer tools and methods of using the same

Abstract

A surface scanning tool and methods of using a surface scanning tool to determine a surface shape of a tool. In embodiments, the surface scanning tool includes a laser, a detector, and a signal analysis module. The laser sends a beam of light that is reflected off a bottom surface of the tool. The detector receives the reflected beam of light and sends the reflected beam of light signals to a signal analysis module. The signal analysis module determines a surface shape of the bottom surface and triggers mitigation actions. In alternative embodiments, the surface scanning tool includes a camera and a signal analysis module. The camera takes a picture of the bottom surface of the tool and sends the image to the signal analysis module. The signal analysis module determines the surface shape of the bottom surface and triggers mitigation actions.

Dependencies are inferred from the claim text.