Interference observation device and interference observation method

Abstract

Provided is an interference observation device comprising: a light source configured to output light; an interference optical system having a reference mirror and configured to split the light emitted from the light source into first light and second light and output interference light between the first light reflected by an observation object and the second light reflected by the reference mirror; an imaging element configured to detect the interference light; a processing unit configured to acquire an interference image on the basis of a detection result of the imaging element and acquire a degree of disorder of an image of a foreign substance region attached to the observation object in the interference image; and an output unit configured to output information about the degree of disorder acquired by the processing unit.

Dependencies are inferred from the claim text.