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US 2026/0309362 A1Published application
Cooling system, a semiconductor apparatus including the same, and a method of replacing a filter using the same
AssigneeSamsung Electronics Co., Ltd.
InventorMOONKI KIM
Life of this patent
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Abstract
A semiconductor apparatus comprises a substrate processing apparatus; and a cooling system connected to the substrate processing apparatus. The cooling system comprises an air supplier; and a filter unit. The filter unit comprises first to third filter parts stacked in a vertical direction; and a blocking panel located in one of the first to third filter parts. The blocking panel is configured to block a path of air through the one of the first to third filter parts.
Claims20
A semiconductor apparatus comprising:
- a substrate processing apparatus;
- and
- a cooling system connected to the substrate processing apparatus,
- wherein the cooling system comprises:
- an air supplier;
- and
- a filter unit,
- wherein the filter unit comprises:
- first to third filter parts stacked in a vertical direction;
- and
- a blocking panel located in one of the first to third filter parts, and
- wherein the blocking panel is configured to block a path of air through the one of the first to third filter parts.
9 more elements
A method of replacing a filter, the method comprising:
- removing a blocking panel from a first filter part;
- locating the blocking panel in a second filter part;
- and
- replacing the filter of the second filter part,
- wherein the replacing of the filter comprises passing air through the first filter part.
2 more elements
A method of replacing a filter, the method comprising:
- sucking outside air into a filter unit providing an air intake path and an air exhaust path, wherein the filter unit comprises:
- a first filter part comprising a first filter and providing a first panel slot;
- a second filter part comprising a second filter and providing a second panel slot;
- and
- a blocking panel,
- removing the blocking panel from the first filter part;
- locating the blocking panel in the second filter part;
- and
- replacing the second filter of the second filter part,
- wherein the first panel slot and the second panel slot are closer to the air intake path than to the air exhaust path.
7 more elements
Dependencies are inferred from the claim text.