Manufacturing automation system, apparatus and method for controlling process environment

Abstract

A manufacturing automation system includes: a cassette loaded with at least one target object and including at least one fan; a transport device, which transfers the cassette; a stocker, which stores the cassette transferred by the transport device, or moves the cassette to one of a plurality of pieces of process equipment, and includes a fan controller, which controls an operation speed of the at least one fan; a data collection device, which collects process information related to the cassette; and a control device, which receives the collected process information, generates fan control information for variably controlling the operation speed of the at least one fan based on the received process information, and transmits the generated fan control information to the fan controller of the stocker.

Dependencies are inferred from the claim text.