Cryopump

A cryopump comprising:

• a cryopump container that defines a cryopump intake port;
• a cryocooler that is installed in the cryopump container and includes a first cooling stage and a second cooling stage that is cooled to a temperature lower than a temperature of the first cooling stage;
• a radiation shield that is thermally coupled to the first cooling stage and extends in an axial direction from the cryopump intake port into the cryopump container;
• and
• a plurality of cryopanels that are thermally coupled to the second cooling stage and are arranged in the axial direction inside the radiation shield,
• wherein the plurality of cryopanels include:
• a top cryopanel closest to the cryopump intake port in the axial direction, and
• at least one cryopanel disposed with a space from the top cryopanel in the axial direction, and
• the top cryopanel includes an opening through which a gas passes into the space between the top cryopanel and the at least one cryopanel.