Adjusting cathode temperature in electrodeposition

Abstract

An electrodeposition tool is presented. The electrodeposition tool comprises an anode chamber configured to hold an anolyte, a cathode chamber configured to hold a catholyte, and a clamshell assembly. The clamshell assembly is configured to position a substrate in the cathode chamber during an electrodeposition process so that a cathode surface of the substrate is exposed to the catholyte. The clamshell assembly comprises at least a cup comprising a substrate interface and a cone configured to clamp the substrate within the cup. The cone comprises a thermal regulator coupled to a wall of the cone. The thermal regulator is operable to adjust a temperature of the cathode surface of the substrate.

Dependencies are inferred from the claim text.