Pressing mechanism, workpiece holding mechanism, and processing apparatus
AssigneeUshio Denki Kabushiki Kaisha
InventorKohei FUJII
Life of this patent
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Abstract
A pressing mechanism includes a support, at least one fluid cylinder, a warpage correction portion, and a tensile portion. The support is disposed above a stage on which a workpiece is placed. The at least one fluid cylinder includes a main body fixed to the support, and a piston rod that protrudes downward from the main body and moves up and down according to a pressure of a fluid supplied to the main body. The warpage correction portion is attached to the piston rod and presses the workpiece against the stage from above by lowering of the piston rod to correct warpage of the workpiece. The tensile portion generates a tensile force between the support and the warpage correction portion along with the lowering of the piston rod.
Claims10
A pressing mechanism, comprising:
- a support disposed above a stage on which a workpiece is placed;
- at least one fluid cylinder including
- a main body fixed to the support, and
- a piston rod that protrudes downward from the main body and moves up and down according to a pressure of a fluid supplied to the main body;
- a warpage correction portion that is attached to the piston rod and presses the workpiece against the stage from above by lowering of the piston rod to correct warpage of the workpiece;
- and
- a tensile portion that generates a tensile force between the support and the warpage correction portion along with the lowering of the piston rod.
A workpiece holding mechanism, comprising:
- a stage on which a workpiece is placed;
- and
- a pressing mechanism including
- a support disposed above the stage,
- at least one fluid cylinder including
- a main body fixed to the support, and
- a piston rod that protrudes downward from the main body and moves up and down according to a pressure of a fluid supplied to the main body,
- a warpage correction portion that is attached to the piston rod and presses the workpiece against the stage from above by lowering of the piston rod to correct warpage of the workpiece, and
- a tensile portion that generates a tensile force between the support and the warpage correction portion along with the lowering of the piston rod.
A processing apparatus, comprising:
- a stage on which a workpiece is placed;
- a pressing mechanism including
- a support disposed above the stage,
- at least one fluid cylinder including
- a main body fixed to the support, and
- a piston rod that protrudes downward from the main body and moves up and down according to a pressure of a fluid supplied to the main body,
- a warpage correction portion that is attached to the piston rod and presses the workpiece against the stage from above by lowering of the piston rod to correct warpage of the workpiece, and
- a tensile portion that generates a tensile force between the support and the warpage correction portion along with the lowering of the piston rod;
- and
- a processing section that performs predetermined processing on the workpiece held on the stage.
Dependencies are inferred from the claim text.