Substrate holding apparatus and substrate bonding apparatus

Abstract

There is provided a substrate holding apparatus including a holding plate that holds a substrate on a holding surface, actuators that are coupled to the holding plate and deform the holding plate at least in a normal direction of the holding surface, a base plate that supports the actuators, a table main body that supports the base plate, and a mechanism that is disposed between the table main body and the base plate and is deformed according to a reaction force of the actuators generated in the base plate. There may be further provided a substrate bonding apparatus including the substrate holding apparatus, and a substrate holding portion that holds another substrate, wherein the substrate and the other substrate are bonded to each other by at least one of the substrate holding apparatus and the substrate holding portion moving such as to approach the other.

Dependencies are inferred from the claim text.