Substrate holding apparatus and substrate bonding apparatus
AssigneeSCREEN Holdings Co., Ltd.
InventorHidehiro MAEDA
Life of this patent
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Abstract
In a first aspect, a substrate holding apparatus is provided. The substrate holding apparatus may include a holding plate that has a holding surface to hold a substrate. The substrate holding apparatus may include a plurality of actuators that are coupled to the holding plate and deform the holding plate at least in a normal direction of the holding surface. The substrate holding apparatus may include a base plate that supports the plurality of actuators. In the substrate holding apparatus, the holding surface may have a predetermined uneven shape in a state where the plurality of actuators are not operated.
Claims11
A substrate holding apparatus comprising:
- a holding plate that has a holding surface to hold a substrate;
- a plurality of actuators that are coupled to the holding plate and deform the holding plate at least in a normal direction of the holding surface;
- and
- a base plate that supports the plurality of actuators,
- wherein the holding surface has a predetermined uneven shape in a state where the plurality of actuators are not operated.
Dependencies are inferred from the claim text.