Single-crystal diamond microchannel without internal modified area, and manufacturing method thereof

Abstract

Provided are a single-crystal diamond microchannel without an internal modified area, and a manufacturing method thereof. The manufacturing method includes: focusing a laser focus on a preset depth position of a target microchannel, and subjecting a bottom area of a side wall of the microchannel to selective induction to form a modified layer; subjecting the microchannel to layer-by-layer scanning, and processing and forming along a preset microchannel path to form a microchannel; and subjecting a resulting processed and formed microchannel to high-temperature oxidation to remove the modified layer in the microchannel, and cleaning and drying to obtain the diamond microchannel without the internal modified structure.

Dependencies are inferred from the claim text.