Laser processing method, laser processing device, and processing result estimation method

A laser processing device for radiating processing laser light to a surface of an object to perform spot processing of the surface, the laser processing device comprising:

• a light source configured to output the processing laser light toward a planned irradiation spot of the surface of the object;
• a beam source configured to output an inspection beam toward the planned irradiation spot;
• a detector configured to detect a result of radiating the inspection beam in the planned irradiation spot;
• an acquiror configured to acquire pre-processing spot data about a pre-processing surface state of the object in the planned irradiation spot on the basis of the result detected by the detector;
• an estimator configured to estimate an optimum parameter of the processing laser light for setting a post-processing surface state of the object in the planned irradiation spot as a target surface state using an estimation program for outputting a result of estimating the optimum parameter of the processing laser light radiated to the planned irradiation spot in accordance with an input of the pre-processing spot data;
• and
• a controller configured to control an output of the processing laser light in the light source on the basis of the result of estimating the optimum parameter of the processing laser light.

A processing result estimation method for estimating post-processing spot data about a post-processing surface state of an object in laser processing for performing spot processing on a surface of the object by radiating processing laser light to the surface, the processing result estimation method comprising:

• a pre-processing acquisition step of radiating an inspection beam to a planned irradiation spot of the processing laser light on the surface of the object and acquiring pre-processing spot data about a pre-processing surface state of the object in the planned irradiation spot on the basis of a result of radiating the inspection beam in the planned irradiation spot;
• and
• an estimation step of estimating the post-processing spot data about the post-processing surface state of the object in the planned irradiation spot when the planned irradiation spot is processed with the processing laser light of any parameter using the pre-processing spot data and an estimation program for outputting a result of estimating the post-processing spot data in accordance with an input of any parameter related to the processing laser light radiated to the planned irradiation spot,
• wherein the pre-processing acquisition step and the estimation step are performed in that order.