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US 2026/0305257 A1Published application
Movable rack system and operating method of the same
AssigneesTsmc China Company Limited, Taiwan Semiconductor Manufacturing Company, Ltd.
InventorsXiao JIN, Rong ZHU, Chen CHEN, Wen-Jing HUANG
Life of this patent
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Abstract
A method includes releasing a fixing device to allow a movement of a rack using a movable track of a linear track system at a first position; moving the rack using the movable track from the first position to a second position; engaging the fixing device to secure the rack in place at the second position; releasing the fixing device to allow the rack to return to the first position using the movable track; engaging the fixing device to lock the rack at the first position.
Claims20
A method, comprising:
- releasing a fixing device to allow a movement of a rack using a movable track of a linear track system at a first position;
- moving the rack using the movable track from the first position to a second position;
- engaging the fixing device to secure the rack in place at the second position;
- releasing the fixing device to allow the rack to return to the first position using the movable track;
- and
- engaging the fixing device to lock the rack at the first position.
3 more elements
A system, comprising:
- a rack having multiple shelves configured to accommodate wafer carriers used in semiconductor processing;
- a horizontal rail positioned adjacent to the rack;
- a linear guidance system disposed below the rack, comprising:
- a movable track integrated with the rack, configured to enable a horizontal movement of the rack along a predefined path;
- and
- a positioning assembly mechanically coupled to the horizontal rail and operatively engaging with the movable track;
- and
- a securing mechanism attached to the rack, operable to lock the rack in position, the securing mechanism comprising a rotational actuator configured to drive an insertion element into an alignment feature within the positioning assembly.
5 more elements
A system, comprising:
- a transfer module configured to transfer a wafer carrier;
- a movable rack positioned adjacent to the transfer module, wherein the movable rack is configured to accommodate the wafer carrier and is operable to move between a first position and a second position;
- a linear track system comprising:
- a track mounted on a lowermost shelf of the movable rack, configured to enable a horizontal movement of the movable rack along a defined path;
- and
- a positioning structure coupled to a rail of the transfer module, wherein the positioning structure is configured to guide the movable rack during the horizontal movement using the track and to ensure an alignment of the movable rack at the first and second positions;
- and
- a securing mechanism mounted on the movable rack, wherein the securing mechanism is configured to selectively engage and disengage to secure the movable rack in place at either the first or second position.
5 more elements
Dependencies are inferred from the claim text.