Support glass substrate and laminated substrate using same
AssigneeNippon Electric Glass Co., Ltd.
InventorsRyota SUZUKI, Ken YUKI, Tetsuya MURATA, Tomonori ICHIMARU, Yuta NAGANO
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Abstract
A support glass substrate of the present invention is a support glass substrate for supporting a substrate s to be processed, the support glass substrate including lithium aluminosilicate-based glass, having a content of Li2O of from 0.02 mol % to 25 mol % in a glass composition, and having an average linear thermal expansion coefficient within a temperature range of from 30° C. to 380° C. of 38×10−7/° C. or more and 160×10−7/° C. or less.
Claims12
1-10. (canceled)
A support glass substrate, comprising a compressive stress layer in a glass surface thereof and comprising as a glass composition, in terms of mol %, 50% to 80% of SiO2, 4% to 25% of Al2O3, 0% to 16% of B2O3, 0.9% to 15% of Li2O, more than 0% to 21% of Na2O, 0% to 15% of K2O, 0% to 10% of MgO, 0% to 10% of ZnO, and 0% to 15% of P2O5.
21-32. (canceled)
Dependencies are inferred from the claim text.