Electrostatic end effector for manufacturing system robot

A substrate transfer robot, comprising:

• an electrostatic end effector, the electrostatic end effector comprising:
• a ceramic base comprising a plurality of pillars configured to support a substrate;
• a first electrode layer disposed between the plurality of pillars on a surface of the ceramic base;
• a dielectric layer disposed on the first electrode layer and on the plurality of pillars;
• and
• a second electrode layer disposed on a portion of the dielectric layer on the plurality of pillars, wherein the electrostatic end effector is configured to generate an electrostatic force upon the substrate responsive to a voltage being applied to the first electrode.

A method of transferring a substrate, comprising:

• positioning the substrate on a plurality of pillars of an electrostatic end effector of a substrate transfer robot;
• applying a voltage to a first electrode layer of the electrostatic end effector disposed between the plurality of pillars while a second electrode layer of the electrostatic end effector is grounded, wherein a dielectric layer of the electrostatic end effector is disposed on the first electrode layer and on the plurality of pillars, wherein the second electrode layer is disposed on a portion of the dielectric layer on the plurality of pillars, and wherein applying the voltage to the first electrode layer is to generate an electrostatic force between the electrostatic end effector and the substrate;
• and
• accelerating the electrostatic end effector while the substrate is held on the electrostatic end effector by the electrostatic force.