Film-like adhesive agent, adhesive film, dicing/die-bonding integrated film, and method for producing semiconductor device
AssigneeResonac Corporation
InventorsShota AOYAGI, Michiko KAYA
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AssigneeResonac Corporation
InventorsShota AOYAGI, Michiko KAYA
Estimating the term…
A film-like adhesive agent is composed of a resin composition having a thermosetting property and containing a rubber component, the film-like adhesive agent having a first surface and a second surface, wherein the film-like adhesive agent has a region in a vicinity of the first surface, in which a content of the rubber component increases from a side of the second surface toward a side of the first surface, and a graph obtained by indentation measurement using an atomic force microscope has: a portion G1 in which an elastic modulus gradually increases starting from a measurement result at the first surface; and a portion G2 in which the elastic modulus is substantially constant from an end point of the portion G1.
A film-like adhesive agent composed of a resin composition having a thermosetting property and comprising a rubber component, the film-like adhesive agent having a first surface and a second surface, wherein:
Dependencies are inferred from the claim text.