Semiconductor layout pattern with offset metal layer and manufacturing method thereof
AssigneeUnited Microelectronics Corp.
InventorsI-Fan Chang, Jia-Rong Wu, Rai-Min Huang, Po-Kai Hsu
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AssigneeUnited Microelectronics Corp.
InventorsI-Fan Chang, Jia-Rong Wu, Rai-Min Huang, Po-Kai Hsu
Estimating the term…
A semiconductor layout pattern includes a first metal layer having a plurality of fishbone line patterns, each fishbone line pattern including a principal axis pattern extending along a first direction and a plurality of branches arranged along a second direction. A second metal layer disposed on the first metal layer includes a plurality of second patterns, and a plurality of magnetic tunnel junction (MTJ) elements are respectively disposed on the second patterns. With respect to any one fishbone line pattern, the second patterns located on a first side of the principal axis pattern and the second patterns located on a second side are offset from each other along the second direction. With respect to two adjacent fishbone line patterns, the second patterns located on a same side are aligned with each other along the second direction.
A semiconductor layout pattern, comprising:
A method for forming a semiconductor layout pattern, comprising:
Dependencies are inferred from the claim text.