Method for manufacturing array sensor element and array sensor element

Abstract

A method for manufacturing an array sensor element includes: (a) depositing an exfoliation film on a first substrate; (b) depositing a passivation film on the exfoliation film; (c) forming piezoelectric elements in an array on the passivation film, the piezoelectric elements each having a first electrode layer, a piezoelectric layer, and a second electrode layer laminated on each other; (d) placing a second substrate over the piezoelectric elements and bonding an element layer including the piezoelectric elements to the second substrate; and (e) irradiating a surface of the first substrate with laser light, the surface being opposite a surface on which the exfoliation film is deposited, and a high-melting-point metal layer is deposited as the first electrode layer when the first electrode layer is a single layer and is deposited as a lowermost layer of the first electrode layer when the first electrode layer has multiple layers.

Dependencies are inferred from the claim text.