Production line for producing solar cell

Abstract

A production line for producing a solar cell includes a texturing device, a boron diffusion device, an etching device, a PECVD device, a passivation system and an electrode manufacturing system. The texturing device is configured to perform a texturing process of an N-type silicon wafer. The boron diffusion device is configured to perform a boron diffusion process. The etching device is configured to perform an etching process and a polishing process. The PECVD device is configured to form a tunneling oxide layer and a silicon layer on a back side of the silicon wafer. The annealing device is configured to perform an annealing process. The passivation system is configured to perform a passivation layer process, a front film process and a back film process. The electrode manufacturing system is configured to perform a preparation process of electrodes on two sides of the silicon wafer to form a solar cell.

Dependencies are inferred from the claim text.