Semiconductor light reception
AssigneeIllumina, Inc.
InventorArvin Emadi
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Abstract
There is set forth herein a device comprising: a detector surface for supporting biological or chemical samples; an array of doped areas formed in a semiconductor formation, wherein the semiconductor formation receives excitation light and emission light from the detector surface, and wherein doped areas of the array of doped areas define photodiodes; a doped region formed in the semiconductor formation in a receive light path of the excitation light and emission light intermediate the detector surface and a doped area of the array of doped areas; and wherein the doped region is configured to impact a travel direction of electrons generated in the doped region as a result of photon absorption.
Claims13
A method comprising:
- forming in a semiconductor formation an array of doped areas;
- forming in the semiconductor formation an array of doped regions spaced apart from the doped areas, wherein respective doped regions of the array of doped regions are associated to respective doped areas of the array of doped areas;
- and
- forming a detector surface, wherein the semiconductor formation is configured to receive excitation light and emission light from the detector surface;
- wherein the respective doped regions are formed in the semiconductor formation in a receive light path of the excitation light and emission light from the detector surface.
Dependencies are inferred from the claim text.