Method for manufacturing semiconductor device, and semiconductor device
AssigneeResonac Corporation
InventorsShintaro NAGAYAMA, Keiichi HATAKEYAMA, Eisaku ISHIKAWA
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AssigneeResonac Corporation
InventorsShintaro NAGAYAMA, Keiichi HATAKEYAMA, Eisaku ISHIKAWA
Estimating the term…
A method for manufacturing a semiconductor device includes: preparing a first semiconductor substrate that includes a first substrate body, a first electrode, and a first insulating layer; preparing a second semiconductor substrate that includes a second substrate body, a second electrode, and a second insulating layer; working a first surface of the first semiconductor substrate on a side opposite to the first substrate body such that the first electrode is recessed with respect to the first insulating layer; working a second surface of the second semiconductor substrate on a side opposite to the second substrate body such that the second electrode project with respect to the second insulating layer; and bonding the first electrode of the first semiconductor substrate to the second electrode of the second semiconductor substrate and bonding the first insulating layer of the first semiconductor substrate to the second insulating layer of the second semiconductor substrate.
A method for manufacturing a semiconductor device comprising:
A semiconductor device comprising:
A semiconductor device comprising:
Dependencies are inferred from the claim text.