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US 2026/0304828 A1Published application
Semiconductor device
AssigneeRohm Co., Ltd.
InventorsCasey Clendennen, Haruki Goto, Junya Ikeda, Koki Kaburaki
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Abstract
Provided is a semiconductor device including a first conductive type semiconductor substrate, a cell region, an outer peripheral region, a first conductive type first semiconductor layer, a first pn region, a second conductive type second semiconductor layer, a second pn region, a first conductive type third semiconductor layer, and an insulating layer.
Claims16
A semiconductor device comprising:
- a first conductive type semiconductor substrate;
- a cell region disposed on the semiconductor substrate and having a cell disposed therein;
- an outer peripheral region disposed on the semiconductor substrate and surrounding the cell region;
- a first conductive type first semiconductor layer disposed across both the cell region and the outer peripheral region on the semiconductor substrate;
- a first pn region disposed in the cell region, extending in a thickness direction of the semiconductor substrate, and formed of a first conductive type first column and a second conductive type second column that are alternately disposed in a first direction perpendicular to the thickness direction;
- a second conductive type second semiconductor layer positioned on the first pn region, extending in the first direction, and connected to the second column;
- a second pn region disposed in the outer peripheral region, extending in the thickness direction, and formed of a first conductive type third column and a second conductive type fourth column that are alternately disposed in the first direction;
- a first conductive type third semiconductor layer positioned on the second pn region, extending in the first direction, and connected to the third column;
- and
- an insulating layer disposed on the second semiconductor layer and the third semiconductor layer, wherein,
- in the second pn region, a plurality of the fourth columns are arranged to be spaced from each other in the first direction,
- the plurality of the fourth columns each have a fourth upper end and a fourth lower end as both ends in the thickness direction, and
- a second conductive type connection layer connecting the plurality of the fourth columns in an area excluding the fourth upper end is disposed in the second pn region.
10 more elements
Dependencies are inferred from the claim text.