US 2026/0303053 A1Published application

High frequency power supply system

AssigneeDAIHEN Corporation

InventorsAsei MIYAMOTO, Shuji OMAE

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Abstract

The high frequency power supply system includes: a high frequency power output circuit 10 that outputs high frequency power; a common sensor 14 provided on a load side of the high frequency power output circuit; a power controller 13 that acquires information related to the high frequency power calculated based on information detected by the common sensor 14 and controls a power value of the high frequency power; drivers 33 and 34 for changing a variable value of variable impedance elements 321 and 322 in a matching circuit 32; and a matching controller 39 that acquires a reflection coefficient ρ or a load-side impedance Z calculated based on the information detected by the common sensor 14 and gives a command signal for changing the variable value of the variable impedance elements 321 and 322 to the drivers so as to decrease the reflected wave power.

Claims8

Dependent claims

A high frequency power supply system, being configured to supply high frequency power to a load, the high frequency power supply system comprising:

a high frequency power output circuit that outputs high frequency power obtained by amplifying a high frequency signal;
a sensor provided on a load side of the high frequency power output circuit;
and
a power controller that acquires information related to high frequency power calculated based on the information detected by the sensor, and controls a power value of the high frequency power output from a high frequency power source using the acquired information;
a matching circuit including at least one variable impedance element having electrodes and windings and having a variable positional relationship regarding the electrodes or between the winding;
a driver provided to change the positional relationship regarding the electrodes or regarding the windings;
and
a matching controller that acquires a reflection coefficient or load-side impedance calculated based on the information detected by the sensor, and uses the acquired reflection coefficient or load-side impedance to give, to the driver, a command signal for changing the positional relationship regarding the electrodes or regarding the windings so as to decrease reflected wave power.

5 more elements

Dependencies are inferred from the claim text.