Heterogeneous antenna in fan-out package
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsPo-Yao Chuang, Po-Hao Tsai, Shin-Puu Jeng
Life of this patent
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Abstract
A method includes bonding an antenna substrate to a redistribution structure. The antenna substrate has a first part of a first antenna, and the redistribution structure has a second part of the first antenna. The method further includes encapsulating the antenna substrate in an encapsulant, and bonding a package component to the redistribution structure. The redistribution structure includes a third part of a second antenna, and the package component includes a fourth part of the second antenna.
Claims20
A structure comprising:
- an antenna substrate comprising a first antenna component;
- a redistribution structure comprising:
- a plurality of dielectric layers;
- a plurality of redistribution lines in the plurality of dielectric layers;
- and
- a second antenna component, wherein the first antenna component and the second antenna component collectively form parts of an antenna;
- and
- a device die between the antennal substrate and the redistribution structure, wherein the device die is electrically connected to the antenna.
A structure comprising:
- a molding compound;
- a device die in the molding compound;
- a redistribution structure electrically coupled to the device die, wherein the redistribution structure comprises:
- a plurality of dielectric layers;
- and
- a plurality of redistribution lines comprising some portions in the plurality of dielectric layers, wherein the redistribution structure comprises a first part of an antenna;
- and
- an antenna substrate, wherein the device die is located between the antenna substrate and the redistribution structure, and wherein the antenna substrate comprises a second part of the antenna.
A structure comprising:
- a molding compound;
- a device die in the molding compound;
- an antenna substrate comprising:
- a dielectric plate;
- a first metal layer over the dielectric plate;
- and
- a second metal layer under the dielectric plate;
- and
- an antenna comprising:
- a first part in one of the first metal layer and the second metal layer;
- and
- a second part underlying the molding compound, wherein the device die is lower than the first part of the antenna, and higher than the second part of the antenna.
Dependencies are inferred from the claim text.