Waveguides and fabrication thereof
AssigneeJones Microwave Inc
InventorsThomas R. Jones, Dimitrios Peroulis, Douglas W. Barlage
Life of this patent
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Abstract
Provided are photoconductive solid-state evanescent-mode waveguide switches, and methods of fabricating and assembling the same. A radio frequency (RF) switch may be configured to switch between impeded and non-impeded states of RF transmission through the switch. Such switches have a high surface area semiconductor protrusion or discrete obstacle within the switch, which provides increased switching speeds between the impeded and non-impeded states.
Claims20
A radio frequency (RF) switch integrated with a semiconductor substrate, the RF switch comprising:
- a waveguide channel disposed in the semiconductor substrate, the waveguide channel comprising at least one internal wall;
- a semiconductor protrusion extending from the at least one internal wall into the waveguide channel, wherein the semiconductor protrusion comprises a surface configured to receive electromagnetic radiation (EMR);
- and
- at least one trench extending into the surface of the semiconductor protrusion.
A radio frequency (RF) switch integrated with a semiconductor substrate, the RF switch comprising:
- a waveguide channel disposed in the semiconductor substrate;
- a discrete semiconductor obstacle disposed in the waveguide channel, wherein the discrete semiconductor obstacle comprises a surface configured to receive electromagnetic radiation (EMR);
- and
- at least one trench extending into the surface of the discrete semiconductor obstacle.
A radio frequency (RF) switch integrated with a semiconductor substrate, the RF switch comprising:
- a first port arranged in the semiconductor substrate;
- a second port arranged in the semiconductor substrate;
- and
- means for selectively impeding transmission of RF signals between the first port and the second port, the means comprising at least one trench.
Dependencies are inferred from the claim text.