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US 2026/0302137 A1Published application
Rf impedance matching network with series-connected diode switches
AssigneeASM America, Inc.
InventorsRonald Anthony DECKER, Imran Ahmed BHUTTA
Life of this patent
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Abstract
In one embodiment, an RF impedance matching circuit is disclosed. The matching circuit includes at least one electronically variable capacitor (EVC). Each EVC includes fixed capacitors, each of the fixed capacitors having a corresponding switching circuit for switching in and out the fixed capacitor to alter a total capacitance of the EVC. Each switching circuit includes a switch operably coupled to the fixed capacitor to cause the switching in and out of the fixed capacitor. The switch includes at least one string of series-connected PIN or NIP diodes. For each string, at least one of the diodes of the string has a balancing capacitor parallel to the diode.
Claims19
A radio frequency (RF) impedance matching circuit comprising:
- an RF input configured to operably couple to an RF source providing an RF signal;
- an RF output configured to operably couple to a plasma chamber;
- at least one electronically variable capacitor (EVC), wherein each EVC of the at least one EVC comprises fixed capacitors, each of the fixed capacitors having a corresponding switching circuit for switching in and out the fixed capacitor to alter a total capacitance of the EVC;
- and
- a control circuit configured to cause the switching in and out of the fixed capacitors of each EVC to enable an impedance match;
- wherein each switching circuit for each fixed capacitor of each EVC comprises:
- a switch operably coupled to the fixed capacitor to cause the switching in and out of the fixed capacitor, the switch comprising at least one string of series-connected diodes, each of the diodes of the series-connected diodes being a PIN diode or an NIP diode;
- wherein, for each of the at least one string, at least one of the diodes of the string having a balancing capacitor parallel to the diode such that the balancing capacitor and the diode have the same voltage across them.
5 more elements
A method of matching an impedance comprising:
- coupling a radio frequency (RF) input of a matching circuit to an RF source providing an RF signal;
- coupling an RF output of the matching circuit to a plasma chamber, wherein the matching circuit comprises:
- at least one electronically variable capacitor (EVC), wherein each EVC of the at least one EVC comprises fixed capacitors, each of the fixed capacitors having a corresponding switching circuit for switching in and out the fixed capacitor to alter a total capacitance of the EVC;
- and
- a control circuit configured to cause the switching in and out of the fixed capacitors of each EVC to enable an impedance match;
- wherein each switching circuit for each fixed capacitor of each EVC comprises:
- a switch operably coupled to the fixed capacitor to cause the switching in and out of the fixed capacitor, the switch comprising at least one string of series-connected diodes, each of the diodes of the series-connected diodes being a PIN diode or an NIP diode;
- wherein, for each of the at least one string, at least one of the diodes of the string having a balancing capacitor parallel to the diode such that the balancing capacitor and the diode have the same voltage across them;
- and
- matching an impedance by at least one of the switching circuits of the at least one EVC switching in or out its corresponding fixed capacitor to alter a total capacitance of the EVC.
7 more elements
A semiconductor processing tool comprising:
- a plasma chamber configured to deposit a material onto a substrate or etch a material from the substrate;
- and
- an impedance matching circuit operably coupled to the plasma chamber, the matching circuit comprising:
- an RF input configured to operably couple to an RF source providing an RF signal;
- an RF output configured to operably couple to the plasma chamber;
- at least one electronically variable capacitor (EVC), wherein each EVC of the at least one EVC comprises fixed capacitors, each of the fixed capacitors having a corresponding switching circuit for switching in and out the fixed capacitor to alter a total capacitance of the EVC;
- and
- a control circuit configured to cause the switching in and out of the fixed capacitors of each EVC to enable an impedance match;
- wherein each switching circuit for each fixed capacitor of each EVC comprises:
- a switch operably coupled to the fixed capacitor to cause the switching in and out of the fixed capacitor, the switch comprising at least one string of series-connected diodes, each of the diodes of the series-connected diodes being a PIN diode or an NIP diode;
- wherein, for each of the at least one string, at least one of the diodes of the string having a balancing capacitor parallel to the diode such that the balancing capacitor and the diode have the same voltage across them.
8 more elements
Dependencies are inferred from the claim text.