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US 2026/0302134 A1Published application
Monolithic modular high-frequency plasma source
AssigneeApplied Materials, Inc.
InventorsTHAI CHENG CHUA, PHILIP ALLAN KRAUS
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Abstract
Embodiments disclosed herein include a monolithic source array. In an embodiment, the monolithic source array comprises a dielectric plate having a first surface and a second surface opposite from the first surface. The monolithic source array may further comprise a plurality of protrusions that extend out from the first surface of the dielectric plate, wherein the plurality of protrusions and the dielectric plate are a monolithic structure.
Claims14
An assembly, comprising:
- a monolithic source array, wherein the monolithic source array comprises a dielectric plate and a plurality of protrusions extending up from a surface of the dielectric plate;
- and
- a housing over the monolithic source array, wherein the housing comprises a plurality of openings sized to receive each of the protrusions.
A processing tool, comprising:
- a chamber;
- and
- an assembly interfacing with the chamber, wherein the assembly comprises:
- a monolithic source array that comprises:
- a dielectric plate having a first surface and a second surface opposite from the first surface, wherein the second surface is exposed to an interior volume of the chamber, and wherein the second surface is exposed to an exterior environment;
- and
- a plurality of protrusions that extend out from the first surface of the dielectric plate, wherein the plurality of protrusions and the dielectric plate are a monolithic structure;
- and
- a housing, wherein the housing comprises:
- a conductive body;
- and
- a plurality of openings through the conductive body, wherein each opening is sized to surround one of the protrusions.
9 more elements
A method of fabricating an assembly, the method comprising:
- forming a monolithic source array, wherein the monolithic source array comprises a dielectric plate and a plurality of protrusions extending up from a surface of the dielectric plate;
- and
- providing a housing over the monolithic source array, wherein the housing comprises a plurality of openings sized to receive each of the protrusions.
Dependencies are inferred from the claim text.