Cascade arc plasma generator
AssigneeHefei Institute of Physical Science, Chinese Academy of Sciences
InventorsHaishan Zhou, Weiyun Zhou, Xin Yang, Yu Li, Guangnan Luo
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AssigneeHefei Institute of Physical Science, Chinese Academy of Sciences
InventorsHaishan Zhou, Weiyun Zhou, Xin Yang, Yu Li, Guangnan Luo
Estimating the term…
A cascade arc plasma generator including a cathode structure, a cascade structure, and an anode structure sequentially connected. When the cascade arc plasma generator works, working gas enters an ionization chamber through a gas inlet channel, a potential difference exists between arc starting pins and an anode body, and the working gas is ionized to form a plasma, which is jetted outside the cascade arc plasma generator through the ionization chamber, a plasma channel, and an anode channel that are connected in sequence, and enters an external device to interact with a material sample. The arc starting pins are parallel to each other and arranged at intervals, and ends of tips thereof are located in a same plane to form a planar plasma source being able to irradiate a large-area material sample or a plurality of material samples at a time.
A cascade arc plasma generator, comprising a cathode structure, a cascade structure, and an anode structure sequentially connected along a plasma jet direction;
Dependencies are inferred from the claim text.