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US 2026/0302124 A1Published application
Ion source and ion implanter having ion source
AssigneeNissin Ion Equipment Co., Ltd.
InventorsSami K. HAHTO, George SACCO
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Abstract
An ion source includes a vaporizer that produces a vapor from a solid raw material, and a plenum including a plenum chamber having a first wall through which the vaporizer is in fluid communication with an interior of the plenum chamber, and a second wall opposite the first wall. The second wall includes a plenum plate with a longitudinal aperture therein.
Claims20
An ion source comprising:
- a vaporizer comprising a nozzle;
- a plenum comprising a plenum chamber having a first wall through which the nozzle extends and a second wall opposite the first wall that comprises a plenum plate;
- and
- an ionization chamber,
- wherein the plenum plate separates the plenum chamber from the ionization chamber, and
- wherein the plenum plate comprises one or more openings in a longitudinal direction.
3 more elements
An ion source comprising:
- a vaporizer comprising a nozzle;
- a plenum chamber having a first wall through which the nozzle extends and a second wall opposite to the first wall, the first wall and the second wall defining an interior space in which a vapor from the vaporizer spreads out from the nozzle;
- and
- an ionization chamber,
- wherein a plenum plate forms the second wall of the plenum chamber and separates the plenum chamber from the ionization chamber, and
- wherein the plenum plate comprises one or more openings in a longitudinal direction through which the plenum chamber is in fluid communication with the ionization chamber.
3 more elements
Dependencies are inferred from the claim text.