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US 2026/0301629 A1Published application
Display device and method of manufacturing the same
AssigneeSamsung Display Co., Ltd.
InventorsMi Sun KIM, Dong Sung LEE, Yong Hoon KWON, Byung Hoon KIM, Tae Oh KIM, Jeong Jin PARK, Se Hun CHOI
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Abstract
A display device includes a base layer including an upper base layer and a lower base layer on a rear surface of the upper base layer; at least one light emitting element on a surface of the upper base layer; and at least one pad on the rear surface of the upper base layer and including a first pad layer adjacent to the upper base layer and a second pad layer adjacent to the lower base layer. The second pad layer includes indium zinc oxide (IZO).
Claims7
A method of manufacturing a display device, the method comprising:
- forming an unetched base layer;
- disposing a pixel circuit layer including a lower connection electrode on the unetched base layer;
- disposing a light emitting element on the pixel circuit layer;
- and
- removing at least a portion of the unetched base layer, wherein
- the forming of the unetched base layer includes:
- providing a lower unetched base layer;
- disposing at least one pad on the lower unetched base layer;
- disposing a barrier layer on the lower unetched base layer;
- and
- patterning an upper base layer on the barrier layer,
- the disposing of the at least one pad includes:
- patterning a second pad layer on the lower unetched base layer;
- and
- patterning a first pad layer on the second pad layer,
- the lower connection electrode is electrically connected to the at least one pad,
- the removing of the at least a portion of the unetched base layer includes exposing at least a portion of the second pad layer by performing a plasma etching process using nitrogen trifluoride gas, and
- the second pad layer includes indium zinc oxide (IZO).
15 more elements
Dependencies are inferred from the claim text.