Image measurement apparatus

An image measurement apparatus comprising:

• a stage for placing a workpiece;
• a light projecting section irradiating the workpiece on the stage with detection light;
• an imaging section receiving the detection light and generating a workpiece image;
• a touch probe for contacting the workpiece on the stage to measure three-dimensional coordinates of a contact point;
• a driving section relatively moving at least one of the stage and the touch probe in a vertical direction, a horizontal direction, or a direction inclined from the vertical direction, thereby bringing the touch probe into contact with a surface of the workpiece placed on the stage;
• a display section displaying the workpiece image generated by the imaging section at a time of measurement setting by the touch probe;
• a receiving section receiving a designation of a position or a region for detecting an edge of the workpiece on the workpiece image displayed on the display section;
• a setting section setting a geometric measurement element for performing a measurement by the touch probe based on the edge detected based on the position or the region received by the receiving section, and setting a contact target position of the touch probe;
• a control section controlling the driving section such that the touch probe sequentially moves to the contact target position of the touch probe at a time of measurement execution;
• and
• a measuring section measuring three-dimensional coordinates of a contact point of the touch probe with the workpiece based on a contact signal output in response to the touch probe coming into contact with the workpiece by an operation of the driving section controlled by the control section, wherein
• the receiving section receives a designation of a parameter related to the contact target position, the parameter including a position and a number for arranging the contact target position in the vertical direction,
• the display section displays a setting screen on which, based on the parameter received by the receiving section, among a plurality of the contact target positions of the touch probe, contact target positions having different positions in the vertical direction are displayed at different positions in a longitudinal direction, and an edge position is displayed, and
• the setting section sets the contact target position of the touch probe based on a setting of the parameter received by the receiving section.

An image measurement apparatus comprising:

• a stage for placing a workpiece;
• a light projecting section irradiating the workpiece on the stage with detection light;
• an imaging section receiving the detection light and generating a workpiece image;
• a touch probe for contacting the workpiece on the stage to measure three-dimensional coordinates of a contact point;
• a driving section relatively moving at least one of the stage and the touch probe in a vertical direction, a horizontal direction, or a direction inclined from the vertical direction, thereby bringing the touch probe into contact with a surface of the workpiece placed on the stage;
• a display section displaying the workpiece image generated by the imaging section at a time of measurement setting;
• a receiving section receiving a designation of a position or a region for detecting an edge of the workpiece on the workpiece image displayed on the display section;
• a setting section setting a geometric measurement element for performing a measurement by the touch probe based on the edge detected based on the position or the region received by the receiving section, and setting a contact target position of the touch probe;
• a control section controlling the driving section such that the touch probe sequentially moves to the contact target position of the touch probe at a time of measurement execution;
• and
• a measuring section measuring three-dimensional coordinates of a contact point of the touch probe with the workpiece based on a contact signal output in response to the touch probe coming into contact with the workpiece by an operation of the driving section controlled by the control section, wherein
• the receiving section receives a designation of a parameter related to the contact target position, the parameter including a position and a number for arranging the contact target position in an inclined direction,
• the display section displays a setting screen on which, based on the parameter received by the receiving section, among a plurality of the contact target positions of the touch probe, contact target positions having different positions in the inclined direction are displayed at different positions in a direction corresponding to the inclined direction, and an edge position is displayed, and
• the setting section sets the contact target position of the touch probe based on a setting of the parameter received by the receiving section.