Process tuning system for substrate processing systems

A system for tuning a process performed on a substrate in a process module of a substrate processing system, the system comprising:

• a first controller connected to the process module of the substrate processing system, wherein the first controller is configured to provide steps to perform the process on the substrate in the process module;
• a plurality of devices of the process module connected to a first network associated with the process module, the plurality of devices configured to perform operations associated with the process;
• and
• a second controller connected to the process module, the second controller comprising:
• an interface configured to receive selected inputs from the plurality of devices via the first network and to provide selected outputs to the plurality of devices via the first network to tune the process, wherein the selected inputs are indicative of the operations of the plurality of devices;
• and
• a processor configured to execute instructions to define the interface, process the selected inputs received during a step of the process, and generate the selected outputs based on the processed selected inputs to adjust one or more of the operations of one or more of the plurality of devices to tune the process during the step of the process.