Electro-absorption modulator and optical modulator integrated laser device

An electro-absorption modulator, comprising:

• a semi-insulating or insulating substrate;
• a first cladding layer of a first conductivity type provided on the substrate;
• a light absorption layer provided on the first cladding layer;
• a second cladding layer of a second conductivity type provided on the light absorption layer;
• and
• a contact layer of the first conductivity type including a part of the first cladding layer or provided between the substrate and the first cladding layer,
• wherein the first cladding layer, the light absorption layer, and the second cladding layer form a mesa structure extending in an optical waveguide direction,
• the contact layer includes:
• a first region including a region located between the mesa structure and the substrate;
• and
• a second region exposed from the first cladding layer for electrical connection,
• the contact layer is partially removed on the substrate, and
• the first region and the second region are interposed between regions where the contact layer has been removed.