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US 2026/0299333 A1Published application
Embedded radio frequency shield between integrated optical modulator and silicon substrate
AssigneeCisco Technology, Inc.
InventorsLong Chen, Qianfan Xu, Li Chen, Mark A. Webster
Life of this patent
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Abstract
A device and a method of fabricating the device are provided. The device includes an optical modulator formed in a dielectric material, a silicon substrate adjacent to the dielectric material, and a metal shield formed in the dielectric material between the optical modulator and the silicon substrate. The metal shield blocks an electromagnetic field of a driving signal of the optical modulator from extending into the silicon substrate.
Claims20
A device comprising:
- an optical modulator formed in a dielectric material;
- a silicon substrate adjacent the dielectric material;
- and
- a metal shield formed in the dielectric material between the optical modulator and the silicon substrate, the metal shield configured to block an electromagnetic field of a driving signal of the optical modulator from extending into the silicon substrate.
1 more element
A device comprising:
- an optical modulator formed in a dielectric material, wherein the dielectric material is positioned directly above a silicon substrate;
- and
- a shield formed in the dielectric material below the optical modulator, the shield configured to block an electromagnetic field of a driving signal of the optical modulator from extending into the silicon substrate, the shield including a plurality of bars positioned in a transverse direction of the driving signal.
Dependencies are inferred from the claim text.