Electro-optical device
AssigneeTDK Corporation
InventorsKenji NAGASE, Hiroshi TAKE, Shingo MIYATA
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Abstract
The invention provides an electro-optical device, comprising: a substrate; an optical waveguide composed of an electro-optic material film formed in a ridge shape on the substrate; a buffer layer configured to cover the optical waveguide; and an upper electrode provided on the optical waveguide through the buffer layer, and the buffer layer has a recess on the upper electrode side above the optical waveguide. According to the electro-optical device of the present invention, the propagation loss of light can be suppressed.
Claims12
1-9. (canceled)
An electro-optical device comprising:
- a substrate;
- an optical waveguide composed of an electro-optic material film formed in a ridge shape on the substrate;
- a buffer layer configured to cover the optical waveguide;
- and
- an upper electrode provided on the optical waveguide through the buffer layer,
- the buffer layer has a recess on the upper electrode side above the optical waveguide.
An electro-optical device comprising:
- a substrate;
- first and second optical waveguides adjacent to each other, composed of an electro-optic material film formed in a ridge shape on the substrate;
- a buffer layer configured to cover the first and second optical waveguides and to be buried between the first and second optical waveguides;
- and
- first and second electrodes arranged to be opposite to the first and second optical waveguides above the buffer layer,
- the buffer layer has recesses above the first and second optical waveguides.
An electro-optical device comprising:
- a substrate;
- first and second optical waveguides adjacent to each other, composed of an electro-optic material film formed in a ridge shape on the substrate;
- a buffer layer configured to cover the first and second optical waveguides and to be buried between the first and second optical waveguides;
- and
- first and second electrodes arranged to be opposite to the first and second optical waveguides above the buffer layer,
- the distance from the surface of the substrate to the uppermost part of the buffer layer on the optical waveguide is smaller than the distance from the surface of the substrate to the uppermost part of the buffer layer on the portion where the optical waveguide is not formed.
Dependencies are inferred from the claim text.