Optical waveguide device, and optical modulation device and optical transmission apparatus using same

Abstract

An object of the present invention is to provide an optical waveguide device that suppresses defective formation of a modulation electrode including a segment electrode and that achieves a high product yield. There is provided an optical waveguide device including: a substrate on which an optical waveguide is formed; and a modulation electrode that is disposed on the substrate and that is used to apply an electric field to the optical waveguide to modulate a light wave propagating through the optical waveguide, in which the modulation electrode includes a plurality of segment electrodes SE that are disposed in proximity to the optical waveguide and along the optical waveguide, and a signal transmission section that is electrically connected to the segment electrodes SE and that transmits a modulation signal, and the segment electrode SE has a T-shape including a horizontal line L1 and a vertical line L2, and an end portion of the horizontal line L1 includes a corner portion (K1, K2) formed with a circular arc or two or more corners.

Dependencies are inferred from the claim text.