Surface relief grating performance and cost enhancements for augmented reality applications
AssigneeTokyo Electron Limited
InventorsRyan BURNS, Michael CARCASI, Robert BRANDT
Life of this patent
Estimating the term…
Abstract
Aspects of the present disclosure provide a method for fabricating a grating coupler. For example, the method can include providing a substrate, forming a plurality of grating elements and a photosensitive material above the substrate, and projecting actinic radiation of varied intensities to expose different regions of the photosensitive material, causing the photosensitive material to generate a solubility-changing agent. The method can also include removing the solubility-changing agent. The actinic radiation of varied intensities can correspond to depths of grooves between the grating elements.
Claims14
A method, comprising the following steps of:
- (a) providing a substrate;
- (b) forming a plurality of grating elements and a photosensitive material above the substrate;
- (c) projecting actinic radiation of varied intensities to expose different regions of the photosensitive material, causing the photosensitive material to generate a solubility-changing agent;
- and
- (d) removing portions of the photosensitive material that have undergone a solubility change due to projecting actinic radiation,
- wherein the actinic radiation of varied intensities corresponds to depths of grooves between the grating elements.
A method, comprising:
- providing a substrate;
- forming a plurality of grating elements on the substrate;
- forming a sacrificial structure besides at least one lateral side of the grating elements;
- and
- spinning a material over the sacrificial structure such that the material flows across and fill grooves between the grating elements and the material filled in the grooves have variable heights.
Dependencies are inferred from the claim text.