Probe apparatus

A probe apparatus that electrically connects an electrode terminal of a device to be inspected and an electrode pad connected to an inspection device, the probe apparatus comprising:

• a housing that has a first surface and a second surface facing the first surface;
• a conductive probe that has a first contact portion exposed on the first surface and a second contact portion exposed on the second surface and is supported by the housing, a posture of the probe changing inside the housing such that a position of a contact region in the second contact portion in contact with the electrode pad changes in response to a displacement of the first contact portion;
• and
• an elastic portion that is arranged inside the housing, and has a first elastic member and a second elastic member integrated with the first elastic member to reinforce an elastic force of the first elastic member, the elastic portion being elastically deformed in response to a change in the posture of the probe inside the housing, and biasing the probe in a direction that cancels the displacement of the first contact portion.