Vibration Rectification Error Correction Device And Sensor Module

A sensor module comprising:

• a plurality of physical quantity sensors;
• and
• a vibration rectification error correction device, wherein
• the vibration rectification error correction device includes
• a reference signal generation circuit configured to output a reference signal, and
• a plurality of frequency ratio measurement circuits,
• a plurality of measurement signals based on output signals of the plurality of physical quantity sensors are input to the plurality of frequency ratio measurement circuits, respectively,
• each of the plurality of frequency ratio measurement circuits includes
• a frequency delta-sigma modulation unit configured to perform frequency delta-sigma modulation on the reference signal using the input measurement signal to generate a frequency delta-sigma modulation signal,
• a first processing unit configured to operate in synchronization with the measurement signal, perform processing of applying a first group delay amount and first filter processing on the frequency delta-sigma modulation signal, and output a first signal, and
• a second processing unit configured to operate in synchronization with the reference signal, perform processing of applying a second group delay amount and second filter processing on the first signal independently of each other, and output a second signal,
• the first group delay amount and the second group delay amount are variable independently of each other, and
• the second group delay amount of each of the plurality of frequency ratio measurement circuits is set such that group delay times from when the measurement signal is input to when the second signal is output coincide with each other among the plurality of frequency ratio measurement circuits.