US 2026/0298965 A1Published application

Microelectromechanical system with improved compensation of the radiometric effect

AssigneeSTMicroelectronics International N.V.

InventorsLuca GUERINONI, Francesco RIZZINI, Gabriele GATTERE

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Abstract

A MEMS system includes an acceleration transducer that generates an acceleration signal, first and second resonators arranged stacked along a first direction and arranged laterally with respect to the acceleration transducer along a second direction, and an electronic circuit. The first and second resonators generate first and second oscillation signals, indicative of first and second resonance frequencies, which depend on the temperatures of the first and second resonators. The electronic circuit determines an uncompensated value of an acceleration, based on the acceleration signal, determines current values of the first and second resonance frequencies, based on the first and second oscillation signals, determines an estimation of an offset of the acceleration signal caused by a temperature gradient along the first direction, based on the current values of the first and second resonance frequencies, and determines a compensated value of the acceleration based on the uncompensated value and the offset estimation.

Claims20

Dependent claims

A MEMS system, comprising:

an acceleration transducer configured to generate an acceleration signal;
a first resonator and a second resonator arranged stacked along a first direction, the first and second resonators being further arranged laterally with respect to the acceleration transducer along a second direction transversal to the first direction;
and
an electronic circuit;
wherein the first and second resonators are configured to generate a first oscillation signal and a second oscillation signal, respectively, indicative of a first resonance frequency and a second resonance frequency, respectively, which depend on a temperature of the first resonator and a temperature of the second resonator, respectively;
and
wherein the electronic circuit is configured to:
determine an uncompensated value of an acceleration to which the MEMS system is subject, based on the acceleration signal;
based on the first and second oscillation signals, determine a current value of the first resonance frequency and a current value of the second resonance frequency;
determine an offset estimation of the acceleration signal caused by a temperature gradient along the first direction present on the acceleration transducer, based on the current values of the first and second resonance frequencies;
and
determine a compensated value of said acceleration based on the uncompensated value and the offset estimation.

9 more elements

Dependencies are inferred from the claim text.