Apparatus for testing electronic semiconductor components

An apparatus for testing an electronic semiconductor component which as a sensor layer for detecting a gaseous substance and is formed on a substrate using a test gas, wherein the apparatus has a chamber enclosing an interior in which negative or positive pressure prevails and in which there are arranged

• a holding device for holding the substrate;
• a nozzle for directionally delivering the test gas onto the sensor layer of the electronic semiconductor component formed on the substrate held by the holding device;
• and
• a contacting device for electrically contacting the semiconductor component at its contact surface, wherein the contacting device is spaced apart from the nozzle;
• wherein the contacting device has an opening through which the nozzle is passed and wherein the nozzle has a nozzle body with a nozzle wall which is spaced apart from the opening in the contacting device.

A method for testing an electronic semiconductor component which has a sensor layer for detecting a gaseous substance and is formed on a substrate using a test gas by an apparatus which has a chamber enclosing an interior in which negative or positive pressure prevails, comprising

• positioning a nozzle with respect to the sensor layer of the electronic semiconductor component to enable a directional delivery of the test gas onto the sensor layer, wherein the nozzle is passed through an opening of a contacting device;
• contacting contact surfaces of the electronic semiconductor component by a contacting device;
• and
• outputting a test signal at contact surfaces of the electronic semiconductor component by the contacting device while the test gas is delivered to the sensor layer by a nozzle.