Physical quantity measurement system

Abstract

A physical quantity measurement system includes a temperature and humidity sensor, a heat generator, and a detector. The temperature and humidity sensor measures the humidity and temperature of gas mixtures flowing through a flow channel. The heat generator performs a heat generating operation that generates heat to warm the temperature and humidity sensor. The detector detects any abnormality in the heat generating operation by the heat generator. The detector detects occurrence of the abnormality when the heat generating operation is being performed by the heat generator and a humidity measured value of the gas mixtures and a temperature measured value of the gas mixtures that have been measured by the temperature and humidity sensor satisfy a predetermined condition.

Dependencies are inferred from the claim text.