Optimizing parameters and locations for nanomechanical testing using machine learning
AssigneeBruker Nano, Inc.
InventorsBenjamin Stadnick, Bernard Becker, Douglas D. Stauffer, Ryan Major
Life of this patent
Estimating the term…
Abstract
Various embodiments provide a method of conducting a nanomechanical process. The method can include establishing values for a set of variables. The method can include running a plurality of nanomechanical tests according to various sets of values for the set of variables. The method can include obtaining data in response to running the tests. The method can include using optimization techniques, such as Bayesian optimization to determine a new set of values for the set of variables. The method can include running an additional test according to the new set of values for the set of variables.
Claims25
A method of conducting a nanomechanical process, comprising:
- (a) establishing a first set of values for a set of variables, a second set of values for the set of variables, and a third set of values for the set of variables;
- (b) running a first nanomechanical test according to the first set of values for the set of variables;
- (c) obtaining a first set of data in response to running the first nanomechanical test;
- (d) running a second nanomechanical test according to the second set of values for the first set of variables;
- (e) obtaining a second set of data in response to running the second nanomechanical test;
- (f) running a third nanomechanical test according to the third set of values for the first set of variables;
- (g) obtaining a third set of data in response to running the third nanomechanical test;
- (h) using Bayesian optimization of the first set of data, the second set of data, and the third set of data to determine a fourth set of values for the first set of variables;
- and
- (i) running a fourth nanomechanical test according to the fourth set of values for the first set of variables to obtain a fourth set of data.
5-11. (canceled)
15-17. (canceled)
A nanomechanical system, comprising:
- a tool head comprising a tool probe, the tool probe comprising a probe tip;
- a sample stage configured for a sample to be placed upon;
- an actuator configured to move the probe tip into contact with a sample disposed on the sample stage;
- a control system comprising non-transitory memory including instructions to perform the steps of:
- (a) establishing a first set of values for a set of variables, a second set of values for the set of variables, and a third set of values for the set of variables;
- (b) running a first nanomechanical test according to the first set of values for the set of variables;
- (c) obtaining a first set of data in response to running the first nanomechanical test;
- (d) running a second nanomechanical test according to the second set of values for the first set of variables;
- (e) obtaining a second set of data in response to running the second nanomechanical test;
- (f) running a third nanomechanical test according to the third set of values for the first set of variables;
- (g) obtaining a third set of data in response to running the third nanomechanical test;
- (h) using Bayesian optimization of the first set of data, the second set of data, and the third set of data to determine a fourth set of values for the first set of variables;
- and
- (i) running a fourth nanomechanical test according to the fourth set of values for the first set of variables to obtain a fourth set of data.
22-28. (canceled)
34-41. (canceled)
A nanomechanical system, comprising:
- a tool head comprising a tool probe, the tool probe comprising a probe tip;
- a sample stage configured for a sample to be placed upon;
- an actuator configured to move the probe tip into contact with a sample disposed on the sample stage;
- a control system comprising non-transitory memory storing instructions to perform the steps of:
- obtaining a sample;
- running a first nanomechanical test at a first location on the sample to obtain a first set of data, at a second location on the sample to obtain a second set of data, and a third location on the sample to obtain a third set of data;
- using Bayesian optimization of the first set of data, the second set of data, and the third set of data to determine a set of additional locations to test on the sample;
- and
- running a second nanomechanical test at the set of additional locations on the sample to obtain at least a fourth set of data.
46-47. (canceled)
Dependencies are inferred from the claim text.