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US 2026/0298744 A1Published application
Strain gauge pressure sensor with improved output
OwnerDavid M STREI, Nicholas E MEYER +1inventors
InventorsDavid M STREI, Nicholas E MEYER, David J HILLMAN
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Abstract
A pressure sensor includes a crystalline substrate and a deflectable diaphragm formed in the crystalline substrate. At least five strain gauges are attached to the deflectable diaphragm with each strain gauge having an electrical characteristic that varies with diaphragm deflection.
Claims21
A pressure sensor comprising:
- a crystalline substrate;
- a deflectable diaphragm formed in the crystalline substrate;
- and
- at least five strain gauges attached to the deflectable diaphragm each strain gauge having an electrical characteristic that varies with diaphragm deflection.
1 more element
A pressure sensor comprising:
- a crystalline substrate;
- a deflectable diaphragm of non-uniform thickness formed in the crystalline substrate;
- and
- at least eight strain gauges mounted to the square deflectable diaphragm and configured to measure the deflection of the deflectable diaphragm.
1 more element
A pressure sensor system comprising:
- a first pressure sensor having a square deflectable diaphragm and at least four strain gauges disposed thereon;
- a second pressure sensor having a square deflectable diaphragm and at least four strain gauges disposed thereon;
- and
- wherein the strain gages from the first and second pressure sensor form a single Wheatstone bridge to increase an electrical signal from the pressure sensor system.
1 more element
Dependencies are inferred from the claim text.