Radiation temperature measurement device, radiation temperature measurement method, and program for radiation temperature measurement device

A radiation temperature measurement method in which a temperature of a measurement target having a substrate and a thin film which is formed on a surface of that substrate is measured, and in which

• an amount of infrared radiation emitted from the measurement target is detected,
• substrate spectral characteristics data showing a temperature dependence of spectral characteristics of the substrate are stored,
• inputs of individual spectral characteristics data showing information relating to a reflectivity and transmissivity at a predetermined temperature of the measurement target are received,
• the temperature dependence of the spectral characteristics of the measurement target are calculated based on the substrate spectral characteristics data and the individual spectral characteristics data, and
• the temperature of the measurement target is calculated based on the detected amount of infrared radiation and on the calculated temperature dependence of the spectral characteristics of the measurement target.

A non-transitory computer-readable medium storing a program for a radiation temperature measurement device that measures a temperature of a measurement target having a substrate and a thin film which is formed on a surface of that substrate, the program executable by a computer to:

• detect an amount of infrared radiation emitted from the measurement target;
• store substrate spectral characteristics data showing a temperature dependence of the spectral characteristics of the substrate;
• receive inputs of individual spectral characteristics data showing information relating to a reflectivity and transmissivity at a predetermined temperature of the measurement target;
• calculate the temperature dependence of the spectral characteristics of the measurement target based on the substrate spectral characteristics data and the individual spectral characteristics data;
• and
• calculate the temperature of the measurement target based on the amount of infrared radiation and on the temperature dependence of the spectral characteristics of the measurement target.